Abstract
Fibre-optical micro-electro-mechanical systems (MEMS) switches for optical communication systems require high-precision mechanical subassemblies due to the sensitivity of single-mode fibre coupling against misalignments. The fibre diameter of 125 μm also demands for actuators with at least ±62.5-μm travel range. Bulk micromachining based on wet anisotropic etching of crystalline silicon allows fabricating actuators and alignment structures with the required accuracy. Two concepts for lensless moving-fibre switches with thermo-mechanical and electrostatic Si-micromachined actuators with large displacements are demonstrated.
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