Fiber-coupled high power stabilized green laser for material processing applications

Abstract

A new high power laser optical system has been developed which is operated by pulsed, green, diode pumped solid state lasers. The design is based on multiplexing of lasers by fiber coupling and is scalable to power levels above 1.6kW. The combined high pulse energy reaches up to 200mJ and is arranged in a line beam by homogenizer based laser optics. Energy density up to 1,000mJ/cm2 is obtained in a 100 -750mm long line. This line beam configuration can, for example, be optimized for both a-Si thin film annealing/crystallization [1] and laser lift off (LLO) applications. Recent results are reported.A new high power laser optical system has been developed which is operated by pulsed, green, diode pumped solid state lasers. The design is based on multiplexing of lasers by fiber coupling and is scalable to power levels above 1.6kW. The combined high pulse energy reaches up to 200mJ and is arranged in a line beam by homogenizer based laser optics. Energy density up to 1,000mJ/cm2 is obtained in a 100 -750mm long line. This line beam configuration can, for example, be optimized for both a-Si thin film annealing/crystallization [1] and laser lift off (LLO) applications. Recent results are reported.