Abstract
A reflective type fiber optic angular displacement sensor has recently been developed, which consists of a light source, an optical isolator, a four-port single-mode fiber bidirectional coupler, and a light intensity detection system (two silicon photodetectors and an analog divider). By using a normal He–Ne laser with ±2% stability in light intensity, we have achieved an angle resolution of 10−6 rad. In this paper, its design principle, instrumentation, calibration results, and sensitivity test have been reported. In addition, possible applications of this sensor, such as in an atomic force microscope, and some feasible improvements of this sensor are discussed.
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