Abstract
Focused Ion Beam instruments (FIB) are used for the preparation of electron microscopy specimens and for the fabrication of nano and micro components. Using polycrystalline Cu as an example, the influence of the crystallographic orientation, as obtained by EBSD, on the milling result is demonstrated. Different milling rates are due to the channeling effect. With some orientations a topography with characteristic features, like ripples, is generated, which were quantified using AFM images.
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