Abstract
FeTaN thin films with uniaxial anisotropy were fabricated by sputtering and patterned into strips with width of 21 µm, separation gap of 10 µm and angular displacement of 0° to 90° from the magnetic easy axis of the unpatterned films. The effective magnetic anisotropy field was effectively modified in both value and direction dependent on the displacement angle. The unpatterned thin films had a maximum permeability of μ′∼700, μ″∼1000 and a ferromagnetic resonance frequency of ∼1.1 GHz. After patterning, the ferromagnetic resonance frequency was found to be ranging from 1 to 1.8 GHz as the angular displacement was varied, indicating that this method is a viable way of tuning the ferromagnetic resonance frequency. These results were well explained according to the well-known Kittel's formula assuming two fold anisotropies in the patterned films.
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