Abstract
PZT(70/30) thick films were fabricated by the sol-gel method. The average grain size increased and the porosity decreased with increasing the number of PZT(30/70) sol infiltration. The thickness of all thick films was approximately 80–82 μ m. The relative dielectric constant increased and dielectric loss decreased with increasing the number of sol infiltration, the values of the 6-coated PZT-6 film were 656, 2.3% at 1kHz, respectively. The remanent polarization, coercive field and breakdown strength of the 6-coated PZT-6 thick films were 27.7 μ C/cm 2 , 13.5 kV/cm and 190 kV/cm, respectively.
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