Abstract
High power microwave properties of the ferroelectric phase shifters have been studied to reduce the effect of the nonlinear response of ferroelectrics under high power microwave with an applied dc bias field of 0 - 40 kV/cm. The Ba 0.6 Sr 0.4 TiO 3 ferroelectric films were prepared on (001) MgO single crystals by pulsed laser deposition. Coplanar waveguide (CPW) phase shifters were fabricated from 2 w m thick Au layer to reduce metal loss. The fabricated CPW phase shifters exhibited more than 100° of differential phase at 10 GHz with a 40 kV/cm dc bias field between ground and center conductors. Furthermore, the CPW phase shifter showed a constant differential phase shift with microwave power range from m 10 to +30 dBm. Microwave power and/or dc bias field dependant responses of phase shifters are presented in the paper.
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