Abstract
Lead-free 0.94Bi0.5Na0.5TiO3–0.06BaTiO3 (BNT–BT) piezoelectric thin films were prepared by metal-organic solution deposition onto a Pt/Ti/SiO2/Si substrate. A dense and well crystallized thin film with a perovskite phase was obtained by annealing these films at 700°C. Atomic force microscopy showed that these films were smooth and crack-free with an average grain size on the order of 200nm. Thin films of 356nm thickness exhibited a small signal dielectric constant and a loss tangent at 1kHz of 613 and 0.044, respectively. Ferroelectric hysteresis measurements indicated a remanent polarization value of 21.5μC/cm2 with a coercive field of 164.5kV/cm. The leakage current density of the thin film was 4.08×10−4A/cm2 at an applied electric field of 200kV/cm. A typical butterfly-shaped piezoresponse loop was observed and the effective piezoelectric coefficient (d33) of the BNT–BT thin film was approximately 51.6pm/V.
Published Version
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