Abstract
KNbO3 films were synthesized at 120–240 °C by a hydrothermal method. The deposition amount of KNbO3 films decreased with decreasing deposition temperature because the deposition rate decreased together with the increase in the starting time of precipitation. The KNbO3 phase was ascertained at temperature as low as 120 °C in films deposited on (100)cSrRuO3//(100)SrTiO3 substrates. On the other hand, powders prepared at 150 °C included the Nb2O5 phase as well as the KNbO3 phase. In addition, powders prepared at 120 °C consist of the K3Nb7O19 phase instead of the KNbO3 phase. KNbO3 films were deposited at 150 °C on LaNiO3/Pt/Ti/polysulfone substrates. Films consisting of the polycrystalline KNbO3 phase were obtained, and their ferroelectricity and piezoelectricity were observed. The remanent polarization and piezoelectric coefficient were 4.2 µC/cm2 and 20–32 pm/V, respectively.
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