Abstract
The floating catalyst CVD using ferrocene–ethanol mist was successfully used to deposit single-walled carbon nanotube (SWCNT) films from the gaseous phase onto a Si substrate and a membrane filter. The home-built vertical mist-CVD system was used without the use of H2 or CO gases. The tiny mist was generated using a high-frequency ultrasonic vibration. The effects of various parameters including furnace temperature, ferrocene/ethanol ratio, the deposition position in the reactor, flow rate of carrier gas, and deposition time on the SWCNTs formation were investigated using SEM, TEM and Raman spectroscopy. The furnace temperature and the flow rate of carrier gas were found to determine the diameter and crystallinity of nanotubes. The ferrocene concentration in ethanol influenced the diameter distribution of nanotubes and the amount of impurity particles in the materials. The collected SWCNT films on a filter were directly transferred to a laminate sheet by using a hot press laminator. The properties of SWCNTs were investigated by UV-Vis spectrophotometer and four-point probe measurement. The high sheet resistance was observed for the as-transferred films. However, the initial results show that a sheet resistance of 10 kΩ/cm2 and an 80% transmittance at the wavelength of 550nm after nitric acid treatment.
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