Femtosecond Pulsed Laser Machining of Fused Silica for Micro-Cavities with Sharp-Corners

Abstract

Abstract Fused silica is the preferred material for applications requiring high temperature resistance, low thermal expansion coefficient and excellent optical properties. The machining of micro-cavities on fused silica surfaces is of particular interest for microfluidic manipulation, mechanical locking, and miniaturization of high-quality optical waveguides, but it still remains technically challenging via traditional manufacturing techniques especially for micro cavities with sharp corners. In the present study, the machining of micro-cavities in fused silica by a femtosecond laser-based method has been investigated numerically and experimentally. The effects of laser machining conditions, including laser power, laser scanning speed, laser incidence angle, and laser-off delay time, on the sidewall slope and bottom surface roughness of the micro-cavities were comprehensively investigated. The results indicated that laser power played a crucially important role in determining the sidewall slope of the micro-cavity, and the laser scanning speed had a significant influence on the bottom surface roughness. Furthermore, the sidewall slope of the micro-cavity was linearly increased as the laser incidence angle increases. By using a laser incidence angle of 10° and a laser-off delay time of 280 ms, a micro-cavity with sidewall slopes close to right angles (10°) was fabricated. This study confirms that femtosecond laser machining is an effective method for fabricating micro-cavities with sharp corners on fused silica surfaces, and the appropriate laser machining conditions should be considered based on practical application scenarios.