Abstract
The advent of near-infrared femtosecond pulse laser has enabled the highly-resolved manufacturing of micro/nano structures in various materials including glass. In this paper, we make use of an automated femtosecond laser system, so-called Femtoprint, to design a monolithic self-instrumented mechanism that we use for in-built strain sensing. To that aim, a flexible structure is designed and produced from a silica planar substrate. It has a flexural joint in which an optical waveguide and a Bragg grating have been directly inscribed using femtosecond pulse laser. The latter provides a non-destructive and non-intrusive measurement tool. The axial strain sensitivity of the in-built Bragg grating has been experimentally determined to be 1.22 pm/μ ϵ, while its temperature sensitivity is 10.51 pm/°C. The demonstration of such instrumented glass flexible mechanisms paves the way towards a new class of highly integrated sensors suitable for applications at the microscale or in harsh environments.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
