Femtosecond laser-induced periodic surface structures on diamond-like nanocomposite films

Abstract

We study the formation of laser-induced periodic surface structures (LIPSS) on diamond-like nanocomposite (DLN) a-C:H:Si:O films and titanium-doped DLN films during femtosecond (fs) laser ablation processing with linearly-polarized beams of IR and visible fs-lasers (wavelengths 1030 nm and 515 nm, pulse duration 320 fs, pulse repetition rates 100 kHz-2 MHz, scanning beam velocity 0.04–0.4 m/s). The studies are focused on (i) comparison of high spatial frequency LIPSS (HSFL) and low spatial frequency LIPSS (LSFL) formed on DLN and Ti-DLN films by IR fs-laser processing, (ii) effects of the pulse repetition rate on the parameters of LIPSS formed on the DLN and Ti-DLN films, (iii) Raman spectroscopy analysis of the LIPSS-structured films with application for ultrathin surface graphitization, and (iv) relationship between the fs-laser-induced surface graphitization and LIPSS formation on the films. A variety of the HSFL and LSFL have been produced on the surface of DLN and Ti-DLN films, with all the LIPSS being oriented perpendicular to the beam polarization direction. The HSFL periods are varied from ~80 to 240 nm and the LSFL periods are varied from 355 to 840 nm, depending on the fs-laser irradiation conditions (wavelength, fluence, pulse repetition rate) and films properties. Various plasmonic effects such as the superposition of the HSFL and LSFL and emergence of very unusual sinusoid-like structures on the DLN and Ti-DLN films are presented and discussed. • LIPSS fabrication on DLN and Ti-DLN films with IR and visible femtosecond lasers • Effect of surface graphitization on HSFL and LSFL formation thresholds • Raman analysis of ultrathin surface graphitization on LIPSS-structured DLN films • Influence of pulse repetition rate on fs-laser ablation and LIPSS parameters • Plasmonic effects in the fs-LIPSS formation on diamond-like nanocomposite films