Femtosecond laser micro-structuring of aluminium under helium

Abstract

The interaction of 180 fs, 775 nm laser pulses with aluminium under a flowing stream of helium at ambient pressure have been used to study the material re-deposition, ablation rate and residual surface roughness. Threshold fluence Fth∼0.4 J cm−2 and the volume ablation rate was measured to be 30<V<450 μm3 per pulse in the fluence range 1.4<F<21 J cm−2. The presence of helium avoids gas breakdown above the substrate and leads to improved surface micro-structure by minimising surface oxidation and debris re-deposition. At 1 kHz rep. rate, with fluence F>7 J cm−2 and >85 W cm−2 average power density, residual thermal effects result in melt and debris formation producing poor surface micro-structure. On the contrary, surface micro-machining at low fluence F∼1.4 J cm−2 with low power density, ∼3 W cm−2 produces much superior surface micro-structuring with minimum melt and measured surface roughness Ra∼1.1±0.1 μm at a depth D∼50 μm. By varying the combination of fluence/scan speed during ultra-fast ablation of aluminium at 1 kHz rep. rate, results suggest that maintaining average scanned power density to <5 W cm−2 combined with single pulse fluence <4 J cm−2 produces near optimum micro-structuring. The debris under these conditions contains pure aluminium nanoparticles carried with the helium stream.