Abstract
We investigated femtosecond-laser-induced modifications on the surface of a single-crystalline diamond and the changes that occur in them with annealing by observing the cross sections of laser-irradiated lines by transmission electron microscopy (TEM). Femtosecond laser pulses were irradiated on the (001) surface of a diamond by scanning along straight lines. An aluminum film was deposited on the (001) surface after the irradiation, and a TEM sample was prepared. Element mapping and electron diffraction analyses showed that the laser-modified regions were composed of single-crystalline diamond, graphite, and amorphous carbon. The existence of aluminum in the laser-modified regions suggested that the regions were porous when laser-irradiated. After the bulk sample was annealed, another cross-sectional TEM sample was prepared. The annealing induced the diffusion of aluminum from the film into the laser-modified regions where the extension of amorphous areas was observed.
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