Abstract
We report the fabrication of micro and nano-disks in single layer chemical vapor deposition graphene on glass substrate using femtosecond laser ablation with vortex Bessel beams. The fabricated graphene disks with diameters ranging from 650 nm to 4 μm were characterized by spatially resolved micro-Raman spectroscopy. The variation of ablation threshold was investigated as a function of the number of pulses showing an incubation effect. A very high degree of size control of the fabricated graphene disks is enabled using a sequence of femtosecond pulses with different vortex orders.
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