Abstract
790 nm, 130 fs ultrashort laser pulses generated by a Ti: sapphire laser system were used to ablate frozen acetone and deposit diamond-like carbon (DLC) films on Si substrate. The film was identified as DLC by Raman spectra. The sp3 bonding fraction in the film was estimated to be 41% from an electron energy loss spectroscopy measurement. Black, conductive films were deposited from frozen acetylene target. Frozen methanol did not produce any deposit. Optical emission was measured to compare the plumes generated by different targets.
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