FEM simulation of trident-type tuning fork resonator characteristics for application to L1-F2 piezoelectric actuator

Abstract

When a piezoelectric vibrator is used as a linear actuator, unstable support condition of a piezoelectric stator vibrator becomes a serious problem. So, we though about application of a trident-type tuning fork resonator to the linear actuator, taking into account that it had a good support characteristic in its low frequency use and therefore it was used as a gyro-sensor and so on before. That is, our purpose is that applying a little displacement in the bottom part of the resonator, we perform a stable support when it is used as a stator vibrator of the ultrasonic linear actuator and it is pressed on to the slider. From this reason, we have done FEM simulation of vibrational characteristics of the trident-type tuning fork resonator, in which L1 and F2 double modes are utilized as the arm-length resonance vibrations. This paper reports the FEM simulation results for performance of the linear actuator.