Abstract

Comparison of numerical simulation and experimental data for nanoindentation studies of nanostructural  carbonaceous-palladium  films  (C-Pd)  is  presented. Finite  Element  Method  (FEM)  and  ANSYS  program  (Ansys,  Inc)  were  used.  Traditional  Oliver–Pharr method for cone and spherical shaped indenter were applied for FEM modelling of nanoindentation  experiment.  FEM  simulations  showed  that  Pd  nanograins  are  moved  in  carbon  matrix  toward  the  film  surface  due  to  an  external  stress.  Distribution  of  palladium  grains  in  the  film  volume  influence  on  the  Young  modulus  and  nanohardness  was  also  found.

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