Abstract
This paper presents a feedback-controlled, MEMS-fabricated microgyroscope. The microgyroscope is basically a high Q system, and thus, the bandwidth is limited to be narrow. To overcome the open-loop performance limitations, a feedback controller is designed to improve the resolution, bandwidth, linearity, and bias stability of the microgyroscope. The feedback controller is applied to the z-axis microgyroscope fabricated by SBM process. The resolution, bandwidth, input range, and bias stability of closed-loop system are improved from 0.0021 deg/sec to 0.0013 deg/sec, from 14.8 Hz to 115 Hz, from ±50 deg/sec to ±200 deg/sec, and from 0.0249 deg/sec to 0.0028 deg/sec, respectively.
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