Abstract
This paer presents a feedback-controlled, MEMS-fabricated microaccelerometer(<TEX>$\mu$</TEX>XL). The <TEX>$\mu$</TEX>XL has received much commercial attraction, but its performance is generally limited. To improve the open-loop performance, a feedback controller is designed and experimentally evaluated. The feedback controller is applied to the x/y-axis <TEX>$\mu$</TEX>XL fabricated by sacrificial bulk micromachining(SBM) process. Even though the resolution of the closed-loop system is slightly worse than open-loop system, the bandwidth, linearity, and bias stability are stability are significantly improved. The noise equivalent resolution of open-loop system is 0.615 mg and that of closed-loop system is 0.864 mg. The bandwidths of open-loop and closed-loop system are over 100Hz. The input range, non-linearity and bias stability are improved from <TEX>$\pm10\;g\;to\;\pm18g$</TEX>, from 11.1%FSO to 0.86%FSO, and from 0.221 mg to 0.128 mg by feedback control, respectively.
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