FeCoHfN thin films fabricated by co-sputtering with high resonance frequency

Abstract

Thin films of FeCoHfN were fabricated by co-sputtering technique with the deposition angles varied. Their dynamic magnetic properties were characterized and discussed in conjunction with an analysis based on Landau–Lifshitz–Gilbert equation. High ferromagnetic resonance frequency beyond 6GHz was achieved by adjusting the deposition angle. A discrepancy between static and magnetic anisotropy was observed and discussed within the framework of Hoffmann's ripple theory. Also, the variations of frequency linewidth, damping factor, and permeability with the change of deposition angle were presented and discussed.