Abstract

The difference in the structure of titanium oxide thin films deposited on fused silica substrates and the Y-cut of a lithium niobate crystal is demonstrated. In both cases, the film is amorphous; however, an insignificant amount of rutile crystallites is observed in the film formed on the Y-cut of the lithium niobate crystal. It is shown that the electrical characteristics of the films depend not only on the material of the substrate, but, in the case of the lithium niobate substrate, also on the direction of an electric field. This is caused by the deformation of the substrate due to the inverse piezoelectric effect.

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