Abstract
The present paper deals with the experimental and numerical study of radio-frequency (RF) low-pressure discharge having both inductive and capacitive or DC channels. Two discharge schemes are considered. In the first case the inductive and capacitive channels are powered by two independent RF power sources. In the second case the inductor and capacitor plates, being the main parts of inductive and capacitive channels, are connected in parallel to one RF power source. The properties of the mentioned discharges are compared with that of pure inductive RF discharge. It is shown that the presence of the capacitive component leads to changes of the fraction of RF power coupled through the inductive channel. This manifests with a reduction of the RF source power value, at which the transition from E- to H-mode takes place, and with the disappearance of hysteresis.
Published Version
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