Abstract
A novel type of computerized tomography (CT) using a scanning probe microscope (SPM) was proposed. For an electrostatic force microscope (EFM) which is a kind of SPM, electrostatic force data was processed using CT to reconstruct the electric charge distribution in the sample. The conjugate gradient method (CGM) was used for the charge reconstruction. The result of computer simulation shows that it is possible to reconstruct the electric charge distribution in the sample from the electrostatic force distribution measured by EFM. In the same way, it will be feasible to reconstruct the inner structure of samples from other SPM data.
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