Abstract
A comprehensive comparison study of electrostatic force microscopy (EFM) and Kelvin probe force microscopy (KPFM) is conducted in this manuscript. First, it is theoretically demonstrated that for metallic or semiconductor samples, both the EFM and KPFM signals are a convolution of the sample surface potential with their respective transfer functions. Then, an equivalent point-mass model describing cantilever deflection under distributed loads is developed to reevaluate the cantilever influence on detection signals, and it is shown that the cantilever has no influence on the EFM signal, while it will affect the KPFM signal intensity but not change the resolution. Finally, EFM and KPFM experiments are carried out, and the surface potential is extracted from the EFM and KPFM images by deconvolution processing, respectively. The extracted potential intensity is well consistent with each other and the detection resolution also complies with the theoretical analysis. Our work is helpful to perform a quantitative analysis of EFM and KPFM signals, and the developed point-mass model can also be used for other cantilever beam deflection problems.
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