Abstract
ABSTRACTWe have investigated the soft magnetic properties of new Fe-Cr-Ta-N and Fe-Cr-Hf-N alloy films. Thin films with compositions in the range of Fe-2∼8%Cr-0∼l%Ta (or Hf)-5∼10%N (in atomic %) were prepared by reactive sputtering in a nitrogen-containing atmosphere. The films, most likely nanocrystalline, exhibit excellent soft magnetic properties in the as-deposited condition without any post-deposition heat treatment, e.g., Hc∼l-2 Oe and 4πMs∼15–20 kG. The magnetic properties are highly anisotropie in the film plane as the easy-axis M-H loop is square and the hard-axis loop is linear and closed, with the anisotropy field Ha=20–100 Oe. The films exhibit excellent high frequency behavior even in the GHz frequency range which is attributed to the combination of high 4πMs and relatively high Ha.
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