Abstract
The fatigue properties of PZT thin films with Pt electrodes are strongly influenced by the grain size. A film with smaller grains has better fatigue properties. We assume that the fatigue is mainly due to the pinning of domain walls in PZT grains by space charges or charged point defects near the Pt electrodes. The point defects always accumulate near the PZT/Pt interface because the internal electric field is very strong near the interface. Therefore the film with a lower fraction of grains touching the Pt electrodes has better fatigue properties. The permittivity of the thin film decreases with decreasing grain size. This may arise from a decrease in the mobility of the domain walls.
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