Fast surface profiler by white-light interferometry by use of a new algorithm based on sampling theory.

Abstract

We propose a fast surface-profiling algorithm based on white-light interferometry by use of sampling theory. We first provide a generalized sampling theorem that reconstructs the squared-envelope function of the white-light interferogram from sampled values of the interferogram and then propose the new algorithm based on the theorem. The algorithm extends the sampling interval to 1.425 microm when an optical filter with a center wavelength of 600 nm and a bandwidth of 60 nm is used. The sampling interval is 6-14 times wider than those used in conventional systems. The algorithm has been installed in a commercial system that achieved the world's fastest scanning speed of 80 microm/s. The height resolution of the system is of the order of 10 nm for a measurement range of greater than 100 microm.