Abstract

An efficient and adaptive boundary tracking method is developed to confine area of interest for high-efficiency local scanning. By using a boundary point determination criterion, the scanning tip is steered with a sinusoidal waveform while estimating azimuth angle and radius ratio of each boundary point to accurately track the boundary of targets. A local scan region and path are subsequently planned based on the prior knowledge of boundary tracking to reduce the scan time. Boundary tracking and local scanning methods have great potential not only for fast dimension measurement but also for sample surface topography and physical characterization, with only scanning region of interest. The performance of the proposed methods was verified by using the alternate current mode scanning ion-conductance microscopy, tapping, and PeakForce modulation atomic force microscopy. Experimental results of single/multitarget boundary tracking and local scanning of target structures with complex boundaries demonstrate the flexibility and validity of the proposed method.

Highlights

  • Scanning probe microscopes (SPMs) [1] are commonly used in the field of nanoscience and technology for high-resolution imaging and quantitative measurements of nanoscale properties

  • The sample is fixed on a closed-loop xyz scanner (MCL-PDQ375HS, 75 × 75 × 50 μm travel range and 0.15 × 0.15 × 0.1 nm motion resolution, Mad City Labs, Inc.) which is further mounted on an xy micropositioning stage for locating the desired position under an optical microscope (20x)

  • A boundary tracking and local scanning method is developed for fast scanning of the region of interest

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Summary

Introduction

Scanning probe microscopes (SPMs) [1] are commonly used in the field of nanoscience and technology for high-resolution imaging and quantitative measurements of nanoscale properties. Andersson et al [26, 27] proposed a highlevel feedback control approach for rapidly imaging the sample with string-like boundaries This method is designed for tracking the edge of the object to reduce the overall imaging time by reducing the total sampling area. In order to extend the application of the proposed method in the field of biological sciences [29], a bacterial cell was scanned to obtain the physical properties of the surface This method has several promising potential applications, for example, automatically tracking and scanning the scattered targets with the optical guiding and path planning, tracking the shape of cellular motility or growth, and investigating the selfassembly processes of structures

Boundary Tracking and Local Scanning
Results and Discussions
Conclusions
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