Abstract
Pulsed laser sources with high repetition rates, high beam quality and pulse-to-pulse stability are available since few years. These sources can be applied to micro-analytical scanning techniques requiring high number of laser pulses in a short time, low signal deviation and good focusability. A scanning laser-induced optical emission spectrometer (Laser-OES) using such a laser source was built up and applied to steel cleanness analysis. This novel analytical technique enables to distinguish between different inclusion types based on their chemical compositions. Coincidences of high intensity peaks for single elements at the same co-ordinates can be connected to specific inclusion types.
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