Abstract
This paper presents the principle, fabrication and characterization of a fast response Thermal Linear Motor (TLM) havingreduced heat loss (and thus power consumption) without reduction in mechanical output power. Our double wedge shaped, aluminum TLM is 12 μm and 6 μm wide at the edges respectively center and 400 μm long. Theory and measurements show that this TLM has up to 20% more mechanical output power for the same electrical input power compared to a simple rectangular beam TLM. The TLM is the crucial driving element for our Hard Disk Drive (HDD) thermal micro actuator. The actuator uses two of the here presented TLMs to accurately move the HDD head up to several micrometers.
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