Fast quasi-coaxial vertical 3D measurement based on galvanometric scanner

Abstract

Vertical measurement is widely studied for its ability to measure objects with drastic changes in surface shape such as deep holes and steps. This paper proposes a fast quasi-coaxial modulations-based 3D measurement system by using a galvanometric scanner, whose rotation is triggered by a field-programmable gate array (FPGA) and is synchronous with the imaging acquisition. In addition, to reduce the influence of background light on reconstruction, a segmented fitting algorithm is proposed, which can remove the background light intensity more appropriately. Experiments demonstrate the validity of the system and background light removal method proposed in this paper.