Abstract
A new type of fast gas valve has been developed for plasma experiments requiring a rapid injection of gas into a vacuum. The valve can be opened and closed within 70 μsec and the gas injection is highly reproducible. A fast opening and closing of the valve, which consists of a low weight aluminum disk sealing against a soft O-ring, is achieved by energizing a coil placed on the O-ring side of the disk and allowing the disk to hit a nearby piece of aluminum and bounce back onto the O-ring. The density distribution of the expanding gas in the vacuum region near the valve was mapped out at particular times shortly after the opening of the valve by using a fast gas gauge. Comparative measurements with a spring loaded valve showed the present valve to have a shorter opening time and much better reproducibility.
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