Abstract
A fast valve which can inject gas pulses with durations from 25 to 400 μs into a vacuum system is described. Quantities up to 5 Torr l can be injected. A pressure rise time of ∼0.5 Torr/μs has been determined at the valve opening. A fast opening time is achieved by having a magnetically accelerated ring collide with a disk which is used as a vacuum seal. Gas pulse parameters have been measured with a fast ionization gauge.
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