Abstract
Fast Free-Form Phase Mask Design for Three-Dimensional Photolithography Using Convergent Born Series
Published Version
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https://doi.org/10.1021/acsphotonics.4c01201
Copy DOIJournal: ACS Photonics | Publication Date: Jan 27, 2025 |
Fast Free-Form Phase Mask Design for Three-Dimensional Photolithography Using Convergent Born Series
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