Abstract
Microfluidic devices are capable of precise drug delivery to the human body. For this purpose, they must be equipped with a compact pump that provides a high flow rate and precise dosing. In this paper, we present a micropump based on a fast electrochemical actuator that meets these requirements. It contains three actuators operating in the peristaltic mode. The device is fabricated from glass and silicon wafers using the standard microfabrication processes. The working part of the pump has a size of about 3 mm3, which is an order of magnitude smaller than other types of diaphragm pumps. The small size of the actuators ensures ultrahigh liquid dosing accuracy of 0.14 nL. At the same time, the high frequency of operation of the actuators makes it possible to develop a specific pumping velocity comparable to other types of pumps.
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