Abstract
Closed loop control of piezoelectric transducers is very important for nanopositioning applications. Up to now usually proportional integral (PI) controlled systems were used which are not fast enough for high performance applications such as fast scanning probe microscopy. Utilizing modern control methods, the performance of the closed loop operated system can be improved which is demonstrated on a standard piezotransducer system. For the design of the model based controller a system identification of the piezodynamics was made. The designed controller was subsequently implemented on a digital signal processor system. A system with a step response of the closed loop operated transducer settling 18-times faster than the standard PI-controlled piezo was realized.
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