Facile approach to mitigate thermal issues in 3D IC integration using effective FIN orientation

Abstract

Thermal through silicon via (TTSV) and heat spreaders plays a vital role in heat management in 3-Dimentional IC integration. However in recent years FIN to TTSV and heat spreaders has proposed to detects and spread heat in any one direction which leads to the damage of an integration circuit (IC). This paper proposes a FIN with optimal directions and heat spreaders to spread the heat in various directions and finally the heat absorb towards heat sink effectively. In this work, we have also demonstrated various thermal cooling effects and its impact on the distribution of potential across IC at different conditions. We have studied these using FEM Simulator for (1) 3D IC architecture with FIN and heat spreaders using Graphene and CNT material, (2) TTSV with FIN and heat spreaders of Graphene, (3) TTSV with fin and heat spreaders of CNT, (4) TTSV with FIN direction towards heat source made of Graphene and CNT, and (5) TTSV with FIN direction towards TSV made of CNT and Graphene. Our result shows that CNT has better thermal cooling management towards heat source as well TSVs than Graphene with order greater than 100 Kelvin.