Abstract
Nonhermetic packaging is one avenue of reducing the module cost of optical devices; however, this requires the coatings applied to the facets of lasers and modulators to be highly stable and impervious to the effects of high humidity under high temperature/high power operating conditions. We have developed two types of facet coatings for nonhermetic applications. One involves electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD) of a SiNx cap layer and the other utilizes ion beam deposition (IBD) of a Ta2O5 cap layer, both on top of a two-layer SiO2/a-Si high-reflectance (HR) coating deposited on the facets of Fabry–Perot (F–P) ridge waveguide (RWG) lasers operating at 1310 nm. The lasers were aged under 85 °C/85% relative humidity (RH) conditions and ex situ tested using drive currents of 10–20 mA (subthreshold) and 80–120 mA operating currents (Iop). The output power–current–voltage (L–I–V) tests were conducted at room temperature and at various time intervals up to 5000 h. For comparison, tests were also done on devices aged in a dry oven.
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