Fabry–Perot Interferometer-Based Absolute Pressure Sensor With Stainless Steel Diaphragm

Abstract

In this paper, we discuss the design, fabrication, and testing of an external Fabry–Perot interferometer (EFPI)-based absolute type fiber optic pressure sensor of range 0–50 mbar. The FPI has sapphire as the first reflecting surface and stainless steel (SS) sheet (SS316L of thickness 0.18 mm) as the second one. In order to achieve high specular reflectivity, the reflecting surface of sapphire is coated with a broad band thin film coating, while the SS316L sheet is surface finished with the Chemo Mechanical Magneto Rheological finishing process. The parallelism between two reflecting surfaces of FPI and their individual flatness is around $\lambda $ /15, which was achieved by precision machining and assembly with stretched diaphragm. The SS sheet also works as the deflecting diaphragm of the pressure sensor and causes change in the FPI gap with applied pressure. FPI gap is calculated from the reflected spectrum by an improvised yet simple scheme. In this paper, FPI is an enclosed cell with vacuum inside, which acts as the reference pressure of the sensor. Applied pressure of 0–50 mbar changed the FPI gap by around $17~\mu \text{m}$ . This sensor was tested with white light interferometric technique, and the best finesse obtained was 5.5. The proposed device is an optical analogous of a capacitance-based pressure sensor. To the best of our knowledge, FPI-based absolute pressure sensors of sub-atmospheric range with a metal diaphragm have not been reported anywhere.