Abstract
The dome-shaped membrane is very important part of the micro/nano devices. The dome-shaped with the thickness of 150 μm and a radius of 3.2 mm was fabricated using the soft lithography process. The Polydimethylsiloxane (PDMS) was selected as a material because it deformable and suitable to implement as a membrane. Soft lithography is based on pattern transfer using a mold that is patterning the substrate material. In this paper, two techniques were suggested to fabricate the dome-shaped membrane which are reflow technique and stamping technique. The comparison was made for both techniques using a Scanning Electron Microscope (SEM) and it seems the stamping technique has an advantage where the uniform thickness of the dome-shaped membrane can be achieved. The discussion on the temperature effect of a stamping technique shows that the suitable temperature to harden the PDMS is in temperature room where the bubbles can be eliminated under this temperature.
Published Version
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