Abstract

AbstractWe report on the realization of monolithic, i.e. fully epitaxial ZnSe‐based microcavities with a 1λ‐cavity and a 3λ‐cavity for the investigation of strong coupling phenomena. A crucial building block is the fabrication of a lattice matched distributed Bragg reflector for the blue spectral region, consisting of quaternary ZnMgSSe layers as the high‐index material and a MgS/ZnCdSe superlattice as the low‐index material. Strong coupling at low temperatures was achieved with a vacuum Rabi splitting of 19 meV for the 1λ‐cavity (at 70K) and of 40 meV for the 3λ‐cavity (at 7 K).Microstructures such as micropillars, waveguides, ringresonators, and molecule chains were fabricated using focused ion‐beam etching. Discrete optical modes in micropillars were observed for both cavity lengths confirming three‐dimensional optical confinement. Q‐factors up to 6500 indicate a high optical quality. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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