Fabrication of YAG ceramics surface without damage and grain boundary steps using catalyzed chemical wet etching

Abstract

Achieving an atomically smooth surface without damage or grain boundary steps is crucial for yttrium aluminum garnet (YAG) ceramics to deliver high-power laser oscillation and stable output. We propose a wet etching method that utilizes a thin-film catalyst, enabling the topmost crystal grain to be selectively removed through a catalyzed chemical reaction. This study demonstrates the effectiveness of the proposed method by polishing Nd- and Yb-doped YAG ceramic substrates. We realized damage-free surfaces having steps with a height of less than 1.0 nm. Such surfaces can effectively deliver high-power laser oscillation with high output stability.