Abstract
High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass and quartz. The YAG ceramics showed an excellent plasma resistance as well as Y2O3 ceramics. After etching in F-plasma for 6h, the eroded depth of YAG ceramics was about 100nm. The plasma resistance of YAG ceramics was far better than that of silicate glass and quartz.
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