Abstract
It has been demonstrated that metamaterials play a very important role in plasmonic devices. The behavior of surface plasmon polaritons (SPPs) is highly related with the roughness of metal/dielectric interface, for instance, a smooth metal surface can largely elongate the propagation length of SPP. In this work, an improved template stripping method is developed to fabricate ultrasmooth metamaterials of nanoscale complementary split ring resonators (CSRRs). By using an ultraviolet photoresist of SU-8 as the adhesive, nanoscale metal CSRR structures with ultrasmooth surface were peeled off from silicon template by employing a combined process of pre-baking, UV irradiation and post-baking. By optimization of the pre-baking temperature and the depth of the nanopatterns, ultrasmooth nanoscale CSRRs with a gap of 30 nm were obtained. Our results indicate that the approach of template stripping by implementation of an SU-8 adhesive layer is an effective method to produce elaborated hollow nanostructures with ultrasmooth surface and nanoscale gap, which may have potentials in sensing applications.
Published Version
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