Abstract
Fabrication of TiO2 micro-structures by combining photolithography with SU-8 photoresist and electrochemical cathodic deposition method was firstly demonstrated in this study. Diameter of the fabricated circular TiO2 micro-structures was ranged from 50 to 125μm, and surface morphology of the TiO2 was found to be porous. Shape of the micro-structures obtained is determined by shape of the SU-8 template prepared, therefore, it can be easily controlled by photolithography conditions. Morphology and crystal structures of the TiO2 micro-structures can be controlled by electrochemical parameters. Therefore, this result demonstrated the possibility to control properties of TiO2 micro-structures fabricated and the potential to improve performance of TiO2 micro-structures in applications.
Published Version
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