Fabrication of through-hole membrane with anodic alumina nanohole array

Abstract

Anodic alumina with a nanohole array has been widely used for the development of various functional nanostructures. Methods of producing a through-hole membrane with an anodic alumina nanohole array have attracted considerable attention. In this study, we demonstrated two new methods of obtaining a fully ordered through-hole membrane that involve nanoimprinting, anodization, sputtering and dissolution in sodium hydroxide (NaOH). Fully ordered porous alumina arrays were obtained using imprinted aluminum (Al). A nanohole array with a pitch of 440nm was obtained by controlling the pattern pitch and anodic voltage, and a membrane with a thickness of about 10μm was obtained by controlling the thickness of the Al foil and the anodization time. Through-hole membranes with 50 and 150nm-thick walls were obtained by the two methods.