Abstract
Thin (0.1–1.5 μm) Pd and Pd Ag alloy membranes have been prepared on porous ceramic substrates consisting of a macroporous α-Al 2O 3 disk coated with a sol-gel derived, mesoporous γ-Al 2O 3 top layer. Metallorganic chemical vapor deposition (MOCVD) and magnetron sputtering were used to coat the thin metallic membranes employing Pd(II) acetylacetonate and a 75% Pd-25% Ag alloy target, respectively. The gas transport properties of the thin metallic membranes were determined by multicomponent permeation experiments with He, H 2 and Ar at 25–300°C and 1 atm total pressure. The H 2 permeance and H 2: He selectivity were in the range 1.0–2.0 × 10 −7 mol m −2 s −1 Pa −1 and 30–200 at 300°C, respectively. The dependence of H 2 permeation rates on membrane thickness and temperature suggest that surface reaction steps are rate-limiting for H 2 transport through the thin, ceramic-supported metallic membranes made by MOCVD and sputtering.
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