Abstract
There has been a large demand for the realization of on-chip fluxgate magnetic sensors, with exciting and sensing control IC circuits. Based on UV lithography and other MEMS technology, a new three dimensional solenoid type micro magnetic sensor has been designed and fabricated to measure the components of magnetic induction vector in outer space. The fabricated micro sensor was integrated in IC circuits of MEMS satellite.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
